微纳制造（影印版）

图书标准信息

• 作者 [美]杰克逊 著
• 出版社 科学出版社
• 出版时间 2007-01
• 版次 1
• ISBN 9787030182432
• 定价 88.00元
• 装帧 平装
• 开本 16开
• 纸张 胶版纸
• 页数 699页
• 字数 1150千字
• 正文语种 英语
• 丛书 微纳技术著作丛书

【内容简介】

纳米技术是当前科学研究与工业开发的热门领域之一。《微纳技术著作丛书：微纳制造（影印版）》全面阐述了微纳器件的设计和制造方面的知识，以及在设计和制造时所要考虑的诸多因素。书中涵盖了多种制造技术，包括微纳制造技术、体和表面微加工技术、LiGA技术、薄膜沉积技术、纳加工技术等。
《微纳技术著作丛书：微纳制造（影印版）》内容丰富，讲解透彻，是一本相关领域电子工程师、材料科研工作者开发微纳米材料应用的全面的指南，同时也可作为微纳米机械和微纳米技术专业研究生的参考书。

【目录】

Preface
1.PrinciplesofMicro-andNanofabrication
1.1Introduction
1.2MaterialRemovalRates
1.3Conclusions
1.4Problems
References

2.MicrofabricationUsingX-rayLithography
2.1Introduction
2.2X-rayLithography
2.3SynchrotronRadiation
2.4MicrofabricationProcess
2.5MethodsofResistApplication
2.6Exposure
2.7Problems
References

3.ManufacturingHighAspectRatioMicrostructures
3.1Introduction
3.2DryEtching
3.3PlasmaEtchingProcesses
3.4CharacteristicsofthePlasma
3.5EtchingofMicrostructures
3.6MicromachiningHighAspectRatioMicrostructures
3.7Micromolding
3.8MicromoldingProcesses
3.9MicromoldingTools
3.10MicromoldDesign
3.11MicromoldingApplications
3.12LimitationsofMicromolding
3.13FabricationofMovingMicrostructures
3.14Conclusions
3.15Problems
References

4.Meso-micromachining
4.1Introduction
4.2SizeEffectsinMicromachining
4.3MechanismforLargePlasticFlow
4.4InhomogeneousMicrostrains
4.5OriginsoftheSizeEffect
4.6Meso-machiningProcesses
4.7Problems
References

5.MechanicalMicromachining
5.1Introduction
5.2MicrofluidicSystems
5.3TheoryofMicromachining
5.4ExperimentalMicromachining
5.5MicromachiningToolDesign
5.6High-SpeedAirTurbineSpindles
5.7MechanicalDesignofRotors
5.8Discussion
5.9Conclusions
5.10FutureDevelopments
5.11Problems
References

6.Microgrinding
6.1Introduction
6.2GrindingWheels
6.3ConventionalGrindingProcesses
6.4PrecisionGrindingProcesses
6.5UltraPrecisionGrinding
6.6Conclusions
6.7Problems
References

7.DiamondMicroCuttingTools
7.1Introduction
7.2PropertiesofDiamond
7.3HistoryofDiamond
7.4CVDDiamondTechnology
7.5CVDDiamondProcesses
7.6TreatmentofSubstrate
7.7ModificationofHFCVDProcess
7.8NucleationandGrowth
7.9Depositionon3-DSubstrates
7.10WearofDiamond
7.11Time-ModulatedCVDDiamond
7.12Conclusions
7.13Problems
References

8.LaserMicro-andNanofabricaUon
6.1Introduction
8.2LaserFundamentals
8.3LaserMicrofabrication
8.4LaserNanofabrication
8.5Conclusions
8.6Problems
References

9.MicromachiningUsingWaterDroplets
9.1Introduction
9.2TheoryofPulsedLiquidImpact
9.3ImpactbyWaterDrops
9.4ModelingMachiningThresholds
9.5ComparativeResults
9.6MaterialRemovalRates
9.7DesignofWater-BasedTools
9.8AnalysisofSpaceFrame
9.9ModeShapesofTetrahedralStructure
9.10Conclusions
9.11Problems
References

10.DiamondNanogrinding
10.1Introduction
10.2PiezoelectricNanogrinding
10.3StressAnalysisinNanogrindingGrains
10.4FractureDominatedWearModel
10.5Nanogrinding
10.6PorousNanogrindingTools
10.7LaserDressingofTools
10.8FutureDirections
10.9Problems
References

11.Nanomachining
11.1Introduction
11.2Nanometricmachining
11.3TheoreticalBasisofNanomachining
11.4Implementation
11.5Conclusions
11.6Problems
References

12.Micro-andNanomanufacturing
12.1Introduction
12.2Micromanufacturing
12.3Nanomanufacturing
12.4CommercializationIssuesofMicroandNanotechnologies
12.5FutureDevelopments
12.6Problems
References
SubjectIndex