3.6.2 Silicon Micromechanical Gyroscope with Direct Frequency Output Questions and Exercises
Chapter 4 Resonant Mass Flow Sensor
4.1 Introduction
4.2 The Basic Working Principle
4.3 Mathematical Model of the Measurement
4.3.1 The Measurement of Mass Flow
4.3.2 Density Measurement
4.3.3 The Measurement of the Two-component Fluid
4.4 Signal Detection Scheme and Its Realization
4.4.1 Phase Difference Detection of the Mass Flow
4.4.2 The Amplitude Ratio Detection of the Mass Flow
4.4.3 Density Detection
4.5 The Implementations of Coriolis Mass Flow Sensor
4.6 The Classification of Coriolis Mass Flow Sensor
4.6.1 The Classification According to the Shape of the Measuring Tube
4.6.2 Classified According to the Number of Segments of the Measuring Tube
4.6.3 Classified According to the Connection of the Measuring Tube with the Double Tube Mode
4.6.4 Classified According to the Layout of the Flowing Direction of the Measuring Tube
4.7 Main Application Fields and its Characteristics
4.7.1 Application Overview
4.7.2 Advantages
4.7.3 Disadvantages
4.8 Interference Factors and Their Restraining
4.8.1 Pressure Loss
4.8.2 Measuring the Flow of Gas
4.8.3 Liquid Containing Gas
4.8.4 Liquid Containing Solid
4.8.5 The Influence of the Parameters of Fluid Conditions or Physical Properties to the Fluid Measurement
4.8.6 The Interference of Nonlinear Vibration and Working Frequency
Questions and Exercises
Chapter 5 Surface Acoustic Wave Resonant Sensor
5.1 Introduction
5.2 SAW Interdigital Transducer
5.2.1 Basic Characteristics of IDT
5.2.2 Basic Analyzing Model of IDT
5.3 SAW Resonator
5.3.1 Structure and Working Principle
5.3.2 Stability of Frequency and Temperature
5.4 Typical SAW Sensor
5.4.1 SAW Strain Sensor
5.4.2 SAW Pressure Sensor
5.4.3 SAW Acceleration Sensor
5.4.4 SAW Gas Sensor
5.4.5 SAW Flow Sensor
Questions and Exercises
Appendix A Dynamic Characteristics Analysis of Vibrating Cylinder Pressure Transducers (VCPT)
Appendix B Mathieu Equation with Application to Analysis of Dynamic Characteristics of Resonant Inertial Sensors
Appendix C Vibration Membrane Liquid Density Sensor
Appendix D Finite-element Modelling and Simulation on Frequency Characteristics of the Silicon Beam Resonator Attached to an E-type Round Diaphragm for Measuring the Concentrated Force
Appendix E Nonlinear Vibration Characteristics of Coriolis Mass Flowmeter
Appendix F Modeling of Coriolis Mass Flow Meter of a General Plane-shape Pipe
Appendix G Frequency Measurement Study of Resonant Vibratory Gyroscopes
Appendix H An Electrothermally Excited Dual Beams Silicon Resonant Pressure Sensor with Temperature Compensation
Appendix I Non-linear Dynamics of an Electrothermally Excited Resonant Pressure Sensor
Appendix J Design and FEM Simulation Study of the Electro-thermal Excitation Resonant Beam with Slit-structure
References
内容摘要 This book systematically discussed the pertinent fundamental theory of the resonant sensors. Then some kinds of resonant sensors including resonant press sensor,resonant acceleration sensor,resonant angular rate sensor,resonant mass flow sensor and surface acoustic wave resonant senor are introduced.
It can be selected as reference to the masters,undergraduates and pertinent engineering staffs whose research direction are instrumentation science and technology,control science and engineering,mechanical engineering etc.
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