现货 Process Variations in Microsystems Manufacturing (2020) (Microsystems and Nanosystems)[9783030405588]

1425 九五品

库存3件

上海宝山

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作者Huff, Michael

出版社Springer

ISBN9783030405588

出版时间2020-04

装帧精装

纸张其他

页数521页

正文语种英语

上书时间2023-03-31

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商品描述: This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps), with an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

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